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The purpose of this paper is to review possibilities of implementing ceramic additive manufacturing (AM) into electronic device production, which can enable great new possibilities.

A short introduction into additive techniques is included, as well as primary characterization of structuring capabilities, dielectric performance and applicability in the electronic manufacturing process.

Ceramic stereolithography (SLA) is suitable for microchannel manufacturing, even using a relatively inexpensive system. This method is suitable for implementation into the electronic manufacturing process; however, a search for better materials is desired, especially for improved dielectric parameters, lowered sintering temperature and decreased porosity.

Relatively inexpensive ceramic SLA, which is now available, could make ceramic electronics, currently restricted to specific applications, more available.

Ceramic AM is in the beginning phase of implementation in electronic technology, and only a few reports are currently available, the most significant of which is mentioned in this paper.

This paper aims to focus on the application of low temperature co-fired ceramic (LTCC) technology in the fabrication of a microfluidic module with integrated microwave components. The design, technology and performance of such an LTCC-based module is investigated. The rapid heating of liquid samples on a microliter scale is shown to be possible with the use of microwaves.

The developed microwave-microfluidic module was fabricated using well-known LTCC technology. The finite element method was used to design the geometry of the microwave circuit. Various numerical simulations for different liquids were performed. Finally, the performance of the real LTCC-based microwave-microfluidic module was examined experimentally.

LTCC materials and technology can be used in the fabrication of microfluidic modules which use microwaves in the heating of the liquid sample. LTCC technology permits the fabrication of matching circuits with appropriate geometry, whereas microwave power can be used to heat up the liquid samples on a microliter scale.

The main limitation of the presented work is found to be in conjunction with LTCC technology. The dimensions and shape of the deposited conductors (e.g. microstrip line, matching circuit) depend on the screen-printing process. A line with resolution lower than 75 µm with well-defined edges is difficult to obtain. This can have an effect on the high-frequency properties of the LTCC modules.

The presented LTCC-based microfluidic module with integrated microwave circuits provides an opportunity for the further development of various micro-total analysis systems or lab-on-chips in which the rapid heating of liquid samples in low volumes is needed (e.g. miniature real-time polymerase chain reaction thermocycler).

Examples of the application of LTCC technology in the fabrication of microwave circuits and microfluidic systems can be found in the available literature. However, the LTCC-based module which combines microwave and microfluidic components has yet to have been reported. The preliminary work on the design, fabrication and properties of the LTCC microfluidic module with integrated microwave components is presented in this paper.

The main purpose of this study is to test the performance of the ink-jet printed microwave resonant circuits on Low temperature co-fired ceramics (LTCC) substrates combined with microfluidic channels for sensor applications. Normally, conductive patterns are deposited on an LTCC substrate by means of the screen-printing technique, but in this paper applicability of ink-jet printing in connection with LTCC materials is demonstrated.

A simple microfluidic LTCC sensor based on the microstrip ring resonator was designed. It was assumed the micro-channel, located under the ring, was filled with a mixture of DI water and ethanol, and the operating frequency of the resonator was tuned to 2.4 GHz. The substrate was fabricated by standard LTCC process, and the pattern of the microstrip ring resonator was deposited over the substrate by means of an ink-jet printer. Performance of the sensor was assessed with the use of various volumetric concentrations of DI water and ethanol. Actual changes in concentration were detected by means of microwave measurements.

It can be concluded that ink-jet printing is a feasible technique for fast fabrication of micro-strip circuits on LTCC substrates, including microfluidic components. Further research needs to be conducted to improve the reliability, accuracy and performance of this technique.

The literature shows the use of ink-jet printing for producing various conductive patterns in different applications. However, the idea to replace the screen-printing with the ink-jet printing on LTCC substrates in connection with microwave-microfluidic applications is not widely studied. Some questions concerning accuracy and reliability of this technique are still open.

This paper aims to perform thermal and mechanical characterization for silver-based sintered thermal joints. Layer quality affects thermal and mechanical performance, and it is important to achieve information about how materials and process parameters influence them.

Thermal investigation of the thermal joints analysis method was focused on determination of thermal resistance, where temperature measurements were performed using infrared camera. They were performed in two modes: steady-state analysis and dynamic analysis. Mechanical analysis based on measurements of mechanical shear force. Additional characterizations based on X-ray image analysis (image thresholding), optical microscope of polished cross-section and scanning electron microscope image analysis were proposed.

Sample surface modification affects thermal resistance. Silver metallization exhibits the lowest thermal resistance and the highest mechanical strength compared to the pure Si surface. The type of dynamic analysis affects the results of the thermal resistance.

Investigation of the layer quality influence on mechanical and thermal performance provided information about different joint types.

The low-temperature co-fired ceramics (LTCC) microfluidic-microwave devices fabrication requires careful consideration of two main factors: the accuracy of deposition of conductive paths and the modification needed to the standard process of the LTCC technology. Neither of them are well-described in the literature.

The first part of this paper deals with the individual impact of screen parameters such as aperture, photosensitive emulsion thickness and mounting angle on the precision of the screen-printed conductive paths fabrication. For the quantitative analysis purposes, the design of experiment method with Taguchi orthogonal array and analysis of variance was used. The second part contains the characterization of the complex permittivity measured for different values of LTCC substrates lamination pressure.

It can be concluded, that the combination of aperture, equal to 24 µm, emulsion thickness 20 µm and mounting angle 22.5° ensures the highest quality of printed conductive metallization. Furthermore, the obtained results indicate, that the modification of the lamination pressure does not affect significantly the dielectric parameters of the LTCC substrates.

This paper shows two aspects of the fabrication of the microfluidic-microwave LTCC devices. First, the resolution of the applied metallization is critical in manufacturing high-frequency structures. The obtained experimental results have shown that optimal screen parameters, in terms of conductive pattern quality, can be found. Second, the received outcomes indicate that the changes in the lamination pressure do not affect significantly the electrical parameters of the substrate. Hence, this effect does not need to be taken into account.

This paper aims to present a research on utilization of an irreversible bonding between non-transparent low temperature co-fired ceramics (LTCC) and transparent poly(dimethylsiloxane) (PDMS). The research presented in this paper is focused on the technology and performance of the miniature microfluidic module for fluorescence measurement.

The chemical combination of both materials is achieved through surface modification using argon-oxygen dielectric barrier discharge (DBD) plasma. According to the performed spectroscopic analyses (X-ray photoelectron spectroscopy, XPS; attenuated total reflection-Fourier infrared spectroscopy, ATR-FTIR) and contact angle measurements, the LTCC and PDMS surfaces are oxidized during the process. The presented microfluidic module was fabricated using LTCC technology. The possibility for the fabrication of LTCC-PDMS microfluidic fluorescent sensor is studied. The performance of the sensor was examined experimentally.

As a result of DBD plasma oxidation, the LTCC and PDMS surfaces change in character from hydrophobic to hydrophilic and were permanently bonded. The presented LTCC-PDMS bonding technique was used to fabricate a microfluidic fluorescent sensor. The preliminary measurements of the sensor have proven that it is possible to observe the fluorescence of a liquid sample from a very small volume.

The presented research is a preliminary work which is focused on the fabrication of the LTCC-PDMS fluorescent sensor. The microfluidic device was positively tested only for ethanolic fluorescein solutions. Therefore, fluorescence measurements should be performed for biological specimen (e.g. DNA).

The LTCC-PDMS bonding technology combines the advantages of both materials. One the one hand, transparent PDMS with precise, transparent three-dimensional structures can be fabricated using hot embossing, soft lithography or laser ablation. On the other hand, rigid LTCC substrate consisting of microfluidic structures, electric interconnections, heaters and optoelectronic components can be fabricated. The development of the LTCC-PDMS microfluidic modules provides opportunity for the construction of a lab-on-chip, or micro-total analysis systems-type system, for analytical chemistry and fast medical diagnoses.

This paper shows utilization of the PDMS-LTCC bonding technology for microfluidics. Moreover, the design, fabrication and performance of the PDMS-LTCC fluorescent sensor are presented.

The purpose of this paper is a presentation of a miniature vertical dielectric barrier discharge (DBD) plasma generators. The presented devices, with sub- and superstrate, were made using low temperature co-fired ceramics (LTCC). Such construction allowed to measure discharge spectra and device temperature easily.

The generators were made in the Du Pont 951 system with silver vertical metallizations and PdAg contacts. The devices had electrodes with different width and height. Also, the distance between them could be established. They were placed on substrate with buried temperature sensor and covered with a ceramic lid. The lid had opening to measure emitted light. Different configurations of vertical DBD were tested.

Geometry of vertical metallizations influences on spectra, as well as distance between them. Signal-to-noise ratio had a maximum for certain generators and can be measured by the intensity of highest peak.

Height of vertical metallizations is limited by the difference in shrinkage of LTCC tape and via paste. Parameters of temperature sensors vary between measurements, according to rapid changes of temperature and presence of strong electric field.

The generators can be used for creating discharge for optical emission spectrometry. It is a convenient method to determine the amount of selected gas compounds.

This paper shows fabrication and performance of the novel vertical DBD generators with ceramic additions for convenient spectra measurement and monitoring temperature of the device during work.

The purpose of this paper is to focus on the technology and performance of the miniature microfluidic module for urea determination. The presented module was made using low-temperature co-fired ceramics (LTCC). It shows the possibility for the integration of the bioreceptor layers with structures that have been fabricated using modern microelectronic technology.

The presented microfluidic module was fabricated using LTCC technology. The possibility for the fabrication of an enzymatic microreactor in a multilayer ceramic substrate, made of CeramTec glass ceramic (GC) material systems with an integrated thick-film heater, is studied. Different configurations of the LTCC/heater materials (gold, silvers and palladium-silver) are taken into account. The performance of the LTCC-based microfluidic module with the integrated heater and immobilized enzyme was examined experimentally.

A compatible material for the heater embedded in the CeramTec GC-based structures was found. The preliminary measurements made for the test solution containing various concentrations of urea have shown stability (for seven days of operation) and a relatively high signal-to-noise ratio (above 3 pH units) for the microreactor’s output signal.

The presented research is a preliminary work which is focused on the fabrication of the LTCC-based microfluidic module, with an integrated heater and immobilized enzyme for urea determination. The device was positively tested using a model reaction of the hydrolysis of urea. However, urea concentration in real (biological) fluid should also be measured.

The development of the LTCC-based microfluidic module for urea determination provides opportunity for the construction of a lab-on-chip, or μTAS-type system, for fast medical diagnoses and the continuous monitoring of various biochemical parameters, e.g. for estimating the effectiveness of hemodialysis.

This paper shows the design, fabrication and performance of the novel microfluidic module for urea determination, made with LTCC technology.

The purpose of this paper is to focus on development and electrical characterization of miniature ion-selective electrode (ISE) for application in micro total analysis system or lab-on-chip devices. The presented ISE is made using low temperature co-fired ceramics (LTCC). It shows possibility of integration chemically sensitive layers with structures fabricated using modern microelectronic technology.

The presented ISEs were fabricated using LTCC microelectronic technology. The possibility of ISE fabrication on multilayer ceramic substrate made of two different LTCC material systems (CeramTec GC, Du Pont 951) with deposited thick-film silver pad is studied. Different configurations of LTCC/silver pad (surface, embedded) are taken into account. Electrical performance of all LTCC-based structures with integrated ISE was examined experimentally.

The preliminary measurements made for ammonium ions have shown good repeatability and linear response with slope of about 30-35 mV/dec. Moreover, no significant impact of the LTCC material system and silver pad configuration on fabricated ISEs’ electrical properties was noticed.

The presented research is a preliminary work. The authors focused on ISE fabrication on LTCC substrates without any microfluidic structures. Therefore, further research work will be needed to evolve ion-selective membrane deposition inside microfluidic structures made in LTCC substrates.

Development of the LTCC-based ISE makes the fabrication of detection units for integrated microfluidic systems possible. These devices can find practical applications in analytical diagnosis and continuous monitoring of various biochemical parameters.

This paper shows design, fabrication and performance of the novel ISE fabrication using LTCC technology.