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As one of the tomographic imaging techniques, electrical capacitance tomography (ECT) is widely used in many industrial applications. While most ECT sensors have electrodes placed around a cylindrical chamber, the planar ECT sensor has been investigated for depth and defect detection. However, the planar ECT sensor has limited height and depth sensing capability due to its single-sided assessment with the use of only a single-plane design. The purpose of this paper is to investigate a dual-plane miniature planar 3D ECT sensor design using the 3 × 3 matrix electrode array.

The sensitivity map of dual-plane miniature planar 3D ECT sensor was analysed using 3D visualisation, the singular value decomposition and the axial resolution analysis. Then, the sensor was fabricated for performance analysis based on 3D imaging experiments.

The sensitivity map analysis showed that the dual-plane miniature planar 3D ECT sensor has enhanced the height sensing capability, and it is less ill-posed in 3D image reconstruction. The dual-plane miniature planar 3D ECT sensor showed a 28% improvement in reconstructed 3D image quality as compared to the single-plane sensor set-up.

The 3 × 3 matrix electrode array has been proposed to use only the necessary electrode pair combinations for image reconstruction. Besides, the increase in number of electrodes from the dual-plane sensor setup improved the height reconstruction of the test sample.