A Screen Printed Multilayer PZT Actuator with an Integrated Force Sensor
Citation
Moilanen, H. and Leppävuori, S. (1995), "A Screen Printed Multilayer PZT Actuator with an Integrated Force Sensor", Microelectronics International, Vol. 12 No. 2, pp. 28-30. https://doi.org/10.1108/eb044562
Publisher
:Emerald Group Publishing Limited
Copyright © 1995, Emerald Group Publishing Limited