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A Screen Printed Multilayer PZT Actuator with an Integrated Force Sensor

H. Moilanen, S. Leppävuori

Microelectronics International

ISSN: 1356-5362

Article publication date: 1 May 1995

58

Citation

Moilanen, H. and Leppävuori, S. (1995), "A Screen Printed Multilayer PZT Actuator with an Integrated Force Sensor", Microelectronics International, Vol. 12 No. 2, pp. 28-30. https://doi.org/10.1108/eb044562

Publisher

:

Emerald Group Publishing Limited

Copyright © 1995, Emerald Group Publishing Limited

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