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1 – 10 of 42Peng Wang, Yulong Zhao, You Zhao, Qi Zhang and Anjiang Cai
The purpose of this paper is proposed a new structure design for high performance accelerometer.
Abstract
Purpose
The purpose of this paper is proposed a new structure design for high performance accelerometer.
Design/methodology/approach
An improved sensitivity structure considering sensitivity, natural frequency and cross-axis sensitivity is established and realized. The proposed structure was designed to improve the trade-off between the sensitivity and the natural frequency of piezoresistive accelerometer and eliminate the lateral sensitivity effect by the specific configuration, which is made possible by incorporating slots into the eight-beam structure. The mechanical model and its mathematical solution are established for calculating the sensitivity and natural frequency behavior of the designed structure. The developed sensor is fabricated on the n-type single-crystal silicon wafer and packaged for experiment. The accelerometer prototype was tested in the centrifugal machine and dynamic calibration system.
Findings
The experimental results show that the sensitivity of the designed sensor is 0.213 mV/(Vg) and the natural frequency of the sensor is 14.22 kHz. Compared with some piezoresistive accelerometers in literatures, the designed sensor possesses a suitable characteristic in sensitivity, natural frequency and transverse effect, which allows its usage in measuring high frequency vibration signals.
Originality/value
The accelerometer with slotted eight-beam structure shows a good performance in the static and dynamic experiments and can be used in measuring high frequency vibration signals.
Details
Keywords
Bian Tian, Huafeng Li, Ning Yang, Yulong Zhao, Pei Chen and Hanyue Liu
It is significant to know the real-time indexes about the turbulence flow of the ocean system, which has a deep influence on ocean productivity, distribution of the ocean…
Abstract
Purpose
It is significant to know the real-time indexes about the turbulence flow of the ocean system, which has a deep influence on ocean productivity, distribution of the ocean populations and transmission of the ocean energy, especially the measurement of turbulence flow velocity. So, it is particularly urgent to provide a high-sensitivity, low-cost and reliable fluid flow sensor for industry and consumer product application. This paper aims to design a micro fluid flow sensor with a cross beam membrane structure. The designed sensor can detect the fluid flow velocity and has a low kinetic energy dissipation rate.
Design/methodology/approach
In this paper, a micro fluid flow sensor with a cross beam membrane structure is designed to measure the ocean turbulence flow velocity. The design, simulation, fabrication and measurement of the designed sensor are discussed. By testing the simply packaged sensor in the fluid flow and analyzing the experiments data, the results show that the designed sensor has favorable performance.
Findings
The paper describes the tests of the designed sensor, and the experimental results show that the designed sensor can measure the fluid flow velocity and has a sensitivity of 11.12 mV/V/(m/s)2 and a low kinetic energy dissipation rate in the range of 10-6-10-4 W/kg.
Originality/value
This paper provides a micro-electro-mechanical systems fluid flow sensor used to measure ocean turbulence flow velocity.
Details
Keywords
Liu Yan, Zhao Yulong and Lu Sun
The purpose of this paper is to provide an improved structural design for accelerometers based on cantilever beam‐mass structure and offer the descriptions of sensor fabrication…
Abstract
Purpose
The purpose of this paper is to provide an improved structural design for accelerometers based on cantilever beam‐mass structure and offer the descriptions of sensor fabrication, packaging and experiments.
Design/methodology/approach
The cantilever beam‐membrane (CB‐membrane) structure is designed as the sensing element for piezoresistive accelerometers. In the CB‐membrane structure, a cantilever beam and two identical membranes as a whole part supports the proof mass. Four piezoresistors are distributed on the surface of the cantilever beam to form a Wheatstone bridge. Finite element method is used to carry out the structural analysis and determine the sensor dimensions. The sensor chip is fabricated by bulk micro‐machining technique, packaged in dual‐in‐line (DIP) way and tested.
Findings
Compared with the conventional cantilever beam‐mass (CB‐mass) structure, the CB‐membrane structure can improve the sensor's performances, including response frequency, output linearity and cross‐axis sensitivity. The results of simulation and experiments prove that the CB‐membrane accelerometer has good performances.
Research limitations/implications
The accelerometer is simply packaged and the zero offset voltage has not been compensated. Moreover, the measured response frequency is lower than the simulated value. Further work and study are needed to solve these problems.
Originality/value
The accelerometer with CB‐membrane structure has good performances as the static and dynamic experiments show and is suitable to detect the spindle vibration of the machine tools.
Details
Keywords
Bian Tian, Yulong Zhao, Zhe Niu and Jiang Zhuangde
The purpose of this paper is to report on a piezoresistive pressure sensor for micro-pressure measurement with a cross-beam membrane (CBM) structure. This study analyzes the…
Abstract
Purpose
The purpose of this paper is to report on a piezoresistive pressure sensor for micro-pressure measurement with a cross-beam membrane (CBM) structure. This study analyzes the dynamic characteristics of the proposed device.
Design/methodology/approach
This CBM sensor possesses high stiffness and sensitivity, measuring dynamic pressure more effectively in a high-frequency environment compared with other piezoresistive structures. The dynamic characteristics are derived using the finite element method to analyze the dynamic responses of the new structure, including natural frequency and lateral effect performances. The CBM dynamic performances are compared with traditional structures.
Findings
The pressure sensor performance was evaluated, and the experimental results indicate that they all exhibit similar dynamic characteristics as the designed model. Compared with traditional structures such as the single island, the CBM proves to be superior in evaluating the dynamic performances of pressure sensors at high frequencies of > 30 kHz.
Originality/value
Most studies of this micro pressure sensors attempt to promote the sensitivity or focus on the static performance of pressure sensor with micro gauge. This study is concerned with analyze the dynamic characterism of micro pressure sensor and compared with the traditional structures, that prove the CBM structure has stable dynamic performance and is a better option for measuring dynamic micro pressure in biomedical applications.
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Keywords
Zhongliang Yu, Yulong Zhao, Lili Li, Cun Li, Xiawei Meng and Bian Tian
The purpose of this study is to develop a piezoresistive absolute micro-pressure sensor for altimetry. For this application, both high sensitivity and high overload resistance are…
Abstract
Purpose
The purpose of this study is to develop a piezoresistive absolute micro-pressure sensor for altimetry. For this application, both high sensitivity and high overload resistance are required. To develop a piezoresistive absolute micro-pressure sensor for altimetry, both high sensitivity and high-overload resistance are required. The structure design and optimization are critical for achieving the purpose. Besides, the study of dynamic performances is important for providing a solution to improve the accuracy under vibration environments.
Design/methodology/approach
An improved structure is studied through incorporating sensitive beams into the twin-island-diaphragm structure. Equations about surface stress and deflection of the sensor are established by multivariate fittings based on the ANSYS simulation results. Structure dimensions are determined by MATLAB optimization. The silicon bulk micromachining technology is utilized to fabricate the sensor prototype. The performances under both static and dynamic conditions are tested.
Findings
Compared with flat diaphragm and twin-island-diaphragm structures, the sensor features a relatively high sensitivity with the capacity of suffering atmosphere due to the introduction of sensitive beams and the optimization method used.
Originality/value
An improved sensor prototype is raised and optimized for achieving the high sensitivity and the capacity of suffering atmosphere simultaneously. A general optimization method is proposed based on the multivariate fitting results. To simplify the calculation, a method to linearize the nonlinear fitting and optimization problems is presented. Moreover, a differential readout scheme attempting to decrease the dynamic interference is designed.
Details
Keywords
Zhou Gaofeng, Zhao Yulong and Jiang Zhuangde
The flexibly thin film grid pressure sensor is mainly used to detect the interface pressure distribution between touching objects. Aim at larger measurement error, the strip…
Abstract
Purpose
The flexibly thin film grid pressure sensor is mainly used to detect the interface pressure distribution between touching objects. Aim at larger measurement error, the strip double sensing layer pressure sensor are designed and fabricated and tested.
Design/methodology/approach
Defects and characteristic of the flexibly thin film grid pressure sensor based on piezoresistive effect are analyzed and pointed out in this paper. After comparison of four sensors, the strip double sensing layer pressure sensor was thought to be best.
Findings
Experiment shows that the strip double sensing layer pressure sensor could eliminate the measurement error basically and illustrates the validity of measuring the interface pressure distribution between area touching objects.
Research limitations/implications
In this paper, only the strip double sensing layer pressure sensor was used to verify the validity of measuring the static interface pressure distribution between peach and platform. But there also exists some problems such as the adhering reliability of electrode and the unevenness of sensing layer. These problems could be overcome in the future research if the fabricating procedure and ingredient of material could be adjusted correctly.
Practical implications
The strip double sensing layer pressure sensor could be applied to detect the static interface pressure distribution such as peach pressure distribution. For dynamic measurement, this research needs to be done further.
Originality/value
Strip double sensing layer pressure sensor with simple “interlayer” structure and with low manufacture cost is presented to basically eliminate the measurement error of interface pressure distribution of original sensor.
Details
Keywords
Bian Tian, Yulong Zhao and Zhuangde Jiang
The purpose of this paper is to investigate the disadvantages of traditional sensors and establish a new structure for pressure measurement.
Abstract
Purpose
The purpose of this paper is to investigate the disadvantages of traditional sensors and establish a new structure for pressure measurement.
Design/methodology/approach
A kind of novel piezoresistive micro‐pressure sensor with a cross‐beam membrane (CBM) structure is designed based on the silicon substrate. Through analyzing the stress distribution of the new structure by finite element method, the model of structure is established and compared with traditional structures. The fabrication is operated on silicon wafer, which applies the technology of anisotropy chemical etching and inductively coupled plasma.
Findings
Compared to the traditional C‐ and E‐type structures, this new CBM structure has the advantages of low nonlinearity and high sensitivities by the cross‐beam on the membrane, which cause the stress is more concentrated in sensitive area and the deflections that relate to the linearity are decreased.
Originality/value
The paper provides the first empirical reports on the new piezoresistive structure for the pressure measurement by fabricating a cross‐beam on the membrane and resolving the conflict of nonlinearity and sensitivity of the piezoresistive sensors.
Details
Keywords
Xuefeng Zhang, Yulong Zhao and Xuelei Zhang
The purpose of this paper is to provide a thin tactile force sensor array based on conductive rubber and to offer descriptions of the sensor design, fabrication and test.
Abstract
Purpose
The purpose of this paper is to provide a thin tactile force sensor array based on conductive rubber and to offer descriptions of the sensor design, fabrication and test.
Design/methodology/approach
The sensor array consists of a sandwich structure. Sensing elements are distributed discretely in the sensor. Each sensing element has two electrodes and a piece of conductive rubber with piezoresistive property. The electrodes, as well as the conductive trace for signal transmission, are printed on the substrate layer by the screen printing technique. A scanning circuit based on zero potential method and an experimental set‐up based on balance to characterize the sensor array are designed and implemented in the test of the sensor array.
Findings
Experimental results verify the validity of the sensor array in measuring the vertical tactile force between the sensing elements and the object.
Research limitations/implications
In this paper, all the sensors are tested without calibration procedures and the procedure of the dynamic test is implemented by manual operation.
Practical implications
The sensor array could be applied to measure the plantar force for gait detection in clinical applications.
Originality/value
The paper presents a tactile force sensor array with discrete sensing elements to essentially restrict the cross‐talk among sensing elements. This paper will provide many practical details that can help others in the field.
Details
Keywords
Abstract
Details
Keywords
Xi Zhang, Yihang Cheng, Juan Liu, Hongke Zhao, Dongming Xu and Yulong Li
Prosocial lending in online crowdfunding has flourished in recent years, and it has become a new way to fundraise for philanthropy. However, there is almost a 70% user attrition…
Abstract
Purpose
Prosocial lending in online crowdfunding has flourished in recent years, and it has become a new way to fundraise for philanthropy. However, there is almost a 70% user attrition rate in crowdfunding. The purpose of this study is to understand what the lender’s lending experience and social connection influence lender retention of online prosocial lending from a self-determination perspective.
Design/methodology/approach
Drawing on self-determination theory (SDT), this research utilizes a quantifiable method for factors of the lender's lending experience and social connection. Additionally, the research constructs economic models to explore the impacts of these factors acting as the necessary conditions for basic psychological needs on lender retention, using a large-scale sample of over 380,000 lenders from Kiva.
Findings
The results indicate that, from the lender's lending experience aspect, the loan narratives with more profit language in the last lending and the failure of past participation are negatively related to lender retention. Regarding the lender's social connection aspect, their friends or small lending teams are positively related to lender retention, while whether they are invited and lending team size show negative influence. Furthermore, results indicate the moderating effects of the disclosure of lending motivation.
Originality/value
This research explores the mechanism of lender retention of online prosocial lending, providing a self-determination perspective about how previous experience influences long-term lending behavior. The study offers significant implications for the literature on online philanthropy, SDT and user retention of online platforms. At the same time, the study provides an understanding of the effects of different aspects of SDT.
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