Daniele Desideri, Alvise Maschio, Dan Doru Micu and Olivia Ramona Miron
The aim of the work was to obtain an auxiliary instrument able to give the magnetic configuration of a magnetron sputtering device for operation with targets, magnetic and non…
Abstract
Purpose
The aim of the work was to obtain an auxiliary instrument able to give the magnetic configuration of a magnetron sputtering device for operation with targets, magnetic and non magnetic, with different heights, starting from a device with no detailed information of the source.
Design/methodology/approach
An inverse problem has been dealt with. A 2D numerical analysis has been performed, which utilizes as a starting point a model identified with a simple analytical procedure based on measurements.
Findings
A satisfactory equivalent model has been identified, and validated in several different conditions.
Originality/value
The proposed approach can be applied when no detailed information of the source is available, in the case of a cathode without a ferromagnetic yoke.