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This paper aims to propose and demonstrate novel microphone sensors based on the frequency delta-sigma modulation (FDSM) technique, which replaces the conventional delta-sigma modulator in the delta-sigma analog-to digital converters. A key of the FDSM technology is to use a voltage-controlled oscillator (VCO) for converting an input analog signal to a 1-bit pulse-density modulated digital signal. High-performance sensors can be realized if the VCO is replaced by an oscillator whose oscillation frequency depends on an external physical parameter.

Microphone sensors are proposed based on FDSM that uses a suspended microstrip disk resonator, where the backside ground plane is replaced by a thin metal diaphragm. A resonant tunneling diode (RTD) oscillator is also used, as the performance of these sensors significantly depends on the oscillation frequency. To demonstrate the basic operation of the proposal, prototype devices were fabricated with an InGaAs/AlAs RTD.

A satisfactory noise shaping property, which is a significant nature of delta-sigma modulation, was demonstrated over three decades for the prototype device. A sound-sensing peak was also clearly observed when applying 1 kHz sound from a speaker.

High-performance ultrasonic microphone sensors can be realized if the sensors are fabricated by using a thin InP substrate with high-frequency oscillator design.

In this study, the authors proposed and experimentally demonstrated novel microphone sensors, which are promising as future ultrasonic sensors that have high dynamic range with wide bandwidth.

In the context of fixed-wing aircraft wing assembly, there is a need for a rapid and precise measurement technique to determine the center distance between two double-hole components. This paper aims to propose an optical-based spatial point distance measurement technique using the spatial triangulation method. The purpose of this paper is to design a specialized measurement system, specifically a spherically mounted retroreflector nest (SMR nest), equipped with two laser displacement sensors and a rotary encoder as the core to achieve accurate distance measurements between the double holes.

To develop an efficient and accurate measurement system, the paper uses a combination of laser displacement sensors and a rotary encoder within the SMR nest. The system is designed, implemented and tested to meet the requirements of precise distance measurement. Software and hardware components have been developed and integrated for validation.

The optical-based distance measurement system achieves high precision at 0.04 mm and repeatability at 0.02 mm within a range of 412.084 mm to 1,590.591 mm. These results validate its suitability for efficient assembly processes, eliminating repetitive errors in aircraft wing assembly.

This paper proposes an optical-based spatial point distance measurement technique, as well as a unique design of a SMR nest and the introduction of two novel calibration techniques, all of which are validated by the developed software and hardware platform.