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This paper intends to lay a background knowledge towards the feasibility of developing a bottom-drive variable capacitance micromotor (VCM) using a surface micromachining process (SMP). The purpose of this paper is to determine the possibility of neglecting the bending of the rotor plates caused by the electrostatic normal forces when deploying a set of mechanical supports.

A multiphysics simulation approach is considered in order to analyse the coupled electromechanical effects in a steady state and to evaluate if the proposed geometries are useful to reduce the bending of the plates.

A surfaced micromachined bottom-drive VCM requires mechanical reinforcement in order to eliminate the risk of an electrical short circuit caused by the deformation in the rotor plates. The combination of an external supporting ring and anchored structural ribs on top of the rotor poles is sufficient to neglect the deformation in the poles of the rotor.

An original analysis with the objective of setting a background in the development of a bottom-drive electrostatic micromotor using a SMP is presented.

This paper presents the results of a heading estimation method for a remotely operated vehicle (ROV). The output rate of commercially available underwater compasses is typically in the order of a few Hz. Heading frequencies of at least 1 KHz are desirable for navigation and control purposes.

The estimation was performed by fusioning the signals of three inertial sensors: the ROV’s own underwater compass (which operates roughly at 10 Hz or less), the ROV’s embedded gyro and an additional angular rate sensor that provides readings from 1 to 3 KHz. The output signal of the additional angular rate sensor is not part of the proposed Kalman filter. Nonetheless a five-point Newton-Cotes closed integration of such signal is fed into the Kalman filter implementation that performs the required heading estimation at 1 KHz or more.

The proposed Kalman filter implementation is a suitable approach to estimate heading position even though the original compass signal rate is significantly slower than the signal required for both assisted and autonomous control.

The estimated heading yield good results in both simulation and experimental environments.

The method was embedded in a dedicated 16-bit DSP that handles both the acquisition of the three signals and the heading estimation, hence resulting in a very low-cost solution. The embedded solution was tested in the developed submarine and the obtained high-rate heading parameter is now used by the control system of the ROV.