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The purpose of this study is the design, fabrication and evaluation of a miniature ozone generator using the principle of electric discharge are presented.

The device was fabricated using a low-temperature co-fired ceramics (LTCC) technology, by which a multilayered ceramic structure with integrated electrodes, buried channels and cavities in micro and millimeter scales was realized.

The developed ozone generator with the dimensions of 63.6 × 41.8 × 1.3 mm produces approximately 1 vol. % of ozone in oxygen flow of 15 ml/min, at an applied voltage of 7 kV.

A miniature ozone generator, manufactured in LTCC technology, produces high amount of ozone and more than it is described in the available references or in datasheets of commercial devices of similar size.

In this manuscript the purpose is to present and evaluate the developed non‐destructive method for analysing the phase composition of LTCC Du Pont “Green Tape 951” material fired in the temperature range from 800 to 1,000°C using X‐ray powder diffraction and Rietveld refinement.

The method uses the crystalline Al2O3 which is already present in the material as an internal standard since its mass fraction was previously found to be constant in the described temperature range.

The results of the non‐destructive analyses and the classical destructive analyses are comparable and the estimated error of the destructive phase analyses and the calculated errors for the non‐destructive phase analyses are of the same order.

The described method can be used also for analysing another type of LTCC material. In this case it is necessary to check whether the mass fraction of any crystalline phase present in the sample is constant in the given temperature range, because only in this case can it be used as an internal standard for a determination of the phase composition.

The non‐destructive method is a fast and easy approach for analysing the fired samples and is also suitable for controlling the phase composition of LTCC materials on 3D complex structures without destroying them, just by using the X‐ray diffraction patterns collected from their surface.

The purpose of this paper is to present the research activity and results to research and development society on the field of ceramic microsystems.

The chemical reactor was developed as a non-conventional application of low temperature co-fired ceramic (LTCC) and thick-film technologies. In the ceramic reactor with a large-volume, buried cavity, filled with a catalyst, the reaction between water and methanol produces hydrogen and carbon dioxide (together with traces of carbon monoxide). The LTCC ceramic three-dimensional (3D) structure consists of a reaction chamber, two inlet channels, an inlet mixing channel, an inlet distributor, an outlet collector and an outlet channel. The inlet and outlet fluidic barriers for the catalyst of the reaction chamber are made with two “grid lines”.

A 3D ceramic structure made by LTCC technology was successfully designed and developed for chemical reactor – methanol decomposition.

Research activity includes the design and the capability of materials and technology (LTCC) to fabricate chemical reactor with large cavity. But further dimensions-scale-up is limited.

The technology for the fabrication of LTCC-based chemical reactor was developed and implemented in system for methanol decomposition.

The approach (large-volume cavity in ceramic structure), which has been developed, can be used for other type of reactors also.