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The purpose of this study is to investigate the structural, surface roughness and corrosion properties of the zirconium oxide thin films deposited onto SS304 substrates using the direct current (DC) magnetron sputtering technique.

DC sputtering at different powers – 80, 100 and 120 W – was used to deposit ZrO₂ thin films onto different substrates (Si/SS304) without annealing of the substrate. Atomic force microscope (AFM), energy-dispersive X-ray spectroscopy (EDS), Tafel extrapolation and contact angle techniques were applied to investigate the surface roughness, chemical compositions, corrosion behavior and hydrophobicity of these films.

Results showed that the thickness of the deposited film increased with power increase, while the corrosion current decreased with power increase. AFM images indicated that the surface roughness decreased with an increase in DC power. EDS analysis showed that the thin film has a stoichiometric ZrO₂ (Zr:O 1:2) composition with basic uniformity. Water contact angle measurements indicated that the hydrophobicity of the synthesized films decreased with an increase in surface roughness.

DC magnetron sputtering technique is infrequently used to deposition thin films. The obtained thin films showed good hydrophobic and anticorrosion properties. Finally, results are compared with other deposition techniques.

Niobium Nitride (NbN) was interesting material for its applications in the medicinal tools or tools field (corresponding to saline serum media) as well as in mechanical properties. The aim of this work was depositing NbN thin films on two types of substrates (stainless steel (SS304) and silicon (100)) using plasma technique at varied powers (100–150 W).

DC magnetron sputtering technique at different powers were used to synthesis NbN films. Film structure was studied using X-ray diffraction (XRD) pattern. Rutherford elastic backscattering and energy dispersive X-ray were used to examine the deposited film composition. The films morphology was studied via atomic force microscopy and scanning electron microscopy images. Corrosion resistance of the three NbN/SS304 films was studied in 0.9% NaCl environment (physiological standard saline).

All properties could be controlled by the modification of DC power, where the crystallinity of samples was changed and consequently the corrosion and microhardness were modified, which correlated with the power. NbN film deposited at higher power (150 W) has shown better corrosion resistance (0.9% NaCl), which had smaller grain size (smoother) and was thicker.

The NbN films have a preferred orientation (111) matching to cubic structure phase. Corrosion resistance was enhanced for the NbN films compared to SS304 substrates (noncoating). Therefore, NbN films deposited on SS304 substrate could be applied as medicinal tools as well as in mechanical fields.