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To present a new generation of liquid flow sensors that is capable of meeting the requirements as imposed by the life science, analysis, biotech and other markets.Design/methodology/approach – A description of the design and development of low flow rate measuring system and typical applications.Findings – The system described uses tubes made of silica, stainless steel or PEEK, and either constant power or constant temperature methods in conjunction with a heater and temperature sensor. The tested instruments were capable of measuring flow ranges between 25‐500 nl/min (smallest flow range) and 100‐2000 μl/min (largest flow range) water, with operating pressures up to 100 bar (up to 400 bar for flow meters with flow ranges below 100 μl/min).Originality/value – Presents information on a new generation of liquid flow sensors.