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High precision robots are often used for complex assembly or positioning tasks. One way to achieve high motion precision is to design mechanical systems based on flexure joints. Flexure joints (or flexures) utilize the elastic properties of matter, which brings avoidance of dry friction. Nanometer scale motions are then possible, without wear, mechanical play or particle emission. Leading to high performance systems in terms of dynamics, parallel kinematics are useful for high precision robot design. Two research projects are presented in this paper. The first one has already led to the realization of a micro electro‐discharge machine (μ‐EDM), and the second one’s goal is to generate a family of compact ultra‐high precision manipulators.