Search results

This paper aims to a novel fabricated resonator structure which consists of some single mechanical resonators as a mass sensor.

The structure is proposed to detect the target molecules and cells in a droplet. Also, at this design the mechanical coupling springs of the proposed structure are designed in such a way that it resonates in shear resonance mode which minimizes the damping effect.

This proposed design can be fabricated in different sizes due to the requirements of an application.

The proposed design is fabricated in mesoscale and its mass sensitivity is evaluated and reported in this paper.

In this work, the sensing and actuating elements are designed with interdigitated capacitors away from the sensitive element on which the droplet is placed. This pattern helps to prevent interference of electrical elements with the droplet. Choosing shear resonance mode at this proposed structure minimizes the damping effect of droplet touch by the resonator structure. The glass-based standard fabrication method of the proposed biosensor is presented exactly.

Mechanical resonator sensors are extremely limited because of the high damping factor and the high electrical conductivity in the aqueous environment. In this work, a molecule detector biosensor is proposed for droplet analysis, which is possible to fabricate using micro-electro-mechanical systems (MEMS) technology. By electromechanical coupling of resonators as a mechanical resonator structure, a standing mechanical wave is formed at this structure by electrostatic actuating elements.

In this paper, a mechanical resonator structure as a biosensor is proposed for micro-droplet analysis that can be fabricated by MEMS technology. It is designed at a lower cost fabrication method using electrostatic technology and interdigitated capacitors. The response of the biosensor displacement frequency at the resonance frequency of the desired mode is reasonable for measuring the capacitive changes of its output. The mass sensitivity of the proposed biosensor is in the range of 1 ng, and it has a large sensitive area for capturing target molecules.

To evaluate the quality of the proposed design, the stimulated analysis is conducted by COMSOL and results are presented.