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Article
Publication date: 3 May 2016

Daniela Diaz-Alonso, Mario Moreno-Moreno, Carlos Zuñiga, Joel Molina, Wilfrido Calleja, Juan Carlos Cisneros, Luis Niño de Rivera, Volodymir Ponomaryov, Felix Gil, Angel Guillen and Efrain Rubio

This paper aims to purpose the new design and fabrication scheme of Touch Mode Capacitive Pressure Sensor (TMCPS), which can be used in a wireless integrated resistor, inductor…

331

Abstract

Purpose

This paper aims to purpose the new design and fabrication scheme of Touch Mode Capacitive Pressure Sensor (TMCPS), which can be used in a wireless integrated resistor, inductor and capacitor circuit for monitoring pressure in biomedical applications.

Design/methodology/approach

This study focuses on the design, simulation and fabrication of dynamic capacitors, based on surface micromachining using polysilicon or aluminum films as the top electrode, both structural materials are capped with a 1.5 μm-thick polyimide film.

Findings

The design of microstructures using a composite model fits perfectly the preset mechanical behavior. After the full fabrication, the dynamic capacitors show complete mechanical flexibility and stability.

Originality/value

The novelty of the method presented in this study includes two important aspects: first, the capacitors are designed as a planar cavity within a rigid frame, where two walls contain channels which allow for the etching of the sacrificial material. Second, the electromechanical structures are designed using a composite model that includes a polyimide film capping for a precise pressure sensing, which also protects the internal cavity and, at the same time, provides full biocompatibility.

Details

Microelectronics International, vol. 33 no. 2
Type: Research Article
ISSN: 1356-5362

Keywords

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Book part
Publication date: 31 October 2022

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Abstract

Details

Business in the 21st Century
Type: Book
ISBN: 978-1-80382-788-9

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