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Article
Publication date: 1 August 2005

P. Markowski, A. Dziedzic and E. Prociow

Possible application of mixed (thick/thin film) thermopiles to supply autonomous microsystems.

745

Abstract

Purpose

Possible application of mixed (thick/thin film) thermopiles to supply autonomous microsystems.

Design/methodology/approach

PdAg/AG or PdAg/TSG thermocouples were deposited onto a circular alumina or LTCC substrates. Their thermoelectric power, resistance as well as output electrical power were characterized vs temperature gradient and chosen parameters of thermopile fabrication process.

Findings

Semiconductors have high Seebeck coefficient, so investigated kind of thermopile has high output electrical power ET. It achieves 50 mV per single junction for temperature difference of about 200°C.

Research limitations/implications

The problem is very high resistivity of germanium alloys, even after burn‐in process. Therefore output electrical power P is seriously reduced. To improve thermocouples properties, optimization process is required. For example, thin film layers quality can be improved, semiconductive arms width can be increased or shorter arms can be used.

Originality/value

Application of mixed thick/thin film technology for fabrication of miniaturized thermoelectric generators.

Details

Microelectronics International, vol. 22 no. 2
Type: Research Article
ISSN: 1356-5362

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Article
Publication date: 1 April 2020

Mirosław Gracjan Gierczak, Eugeniusz Prociów and Andrzej Dziedzic

This paper aims to focus on the fabrication and characterization of mixed thin-/thick-film thermoelectric microgenerators, based on magnetron sputtered constantan (copper–nickel…

157

Abstract

Purpose

This paper aims to focus on the fabrication and characterization of mixed thin-/thick-film thermoelectric microgenerators, based on magnetron sputtered constantan (copper–nickel alloy) and screen-printed silver. To improve the adhesion of the constantan layer to the applied substrates, the additional chromium sublayer was used. The aim of the study was to investigate the influence of chromium sublayer on the electrical and thermoelectric properties of such hybrid microgenerators.

Design/methodology/approach

Fabrication of such structures consisted of several steps – magnetron sputtering of the chromium and then constantan layer, exposing the first arms of thermocouples, applying the second arms by screen-printing technology and firing the prepared structures in a belt furnace. The structures were made both on Al2O3 (alumina) and low temperature co-fired ceramics (LTCC) substrates.

Findings

To the best of the authors’ knowledge, for the first time, laser ablation process was applied to fabricate the first arms of thermocouples from a layer of constantan only or constantan with a chromium sublayer. Geometric measurements have shown that the mapping of mask pattern by laser ablation technique is very accurate.

Originality/value

The determined Seebeck coefficient of the realized structures was about 40.4 µV/K. After firing the exemplary structures at 850°C peak temperature, Seebeck coefficient is increased to an average value of 51 µV/K.

Details

Microelectronics International, vol. 37 no. 2
Type: Research Article
ISSN: 1356-5362

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Article
Publication date: 3 August 2015

Piotr Markowski, Eugeniusz Prociów and Łukasz Urbaniak

The purpose of this paper is to determine the thermoelectric properties of the germanium-based thin films and selecting the most suitable ones for fabrication of micrognerators…

213

Abstract

Purpose

The purpose of this paper is to determine the thermoelectric properties of the germanium-based thin films and selecting the most suitable ones for fabrication of micrognerators.

Design/methodology/approach

The germanium layers were deposited by low pressure magnetron sputtering method, in the pressure of 10−3/104 mbar range. The amount of dopants (germanium or vanadium) was changed in a limited extent. The influence of such changes on the layers output properties was studied. Post-processing heat treatment at temperature below 823 K was applied to activate the layers. It leads to improve the electrical and thermoelectrical performance.

Findings

The special attention was paid to the power factor (PF = S2/ρ) of the layers. To estimate power factor (PF) electrical resistivity (ρ) and Seebeck coefficient (S) were determined. The achieved Seebeck coefficient value was 185 Volt/Kelvin (μV/K) for germanium doped with vanadium (Ge:V1.15) and 225 μV/K for germanium doped with gold(Ge:Au3.13) layers at room temperature. After activation process, the PF reached a value of 2.5 × 10−4 W/m · K2 for the Ge:Au3.13 and 1.1 × 10−4 W/m · K2 for the Ge:V1.15 layers.

Originality/value

The fabricated thermoelectric layers can be thermally annealed in temperature up to 823 K in the air and in 1,023 K under a nitrogen atmosphere. This enables integration of thin layers with thick-film technology. Corning glass or low temperature cofired ceramic was used as a substrate.

Details

Microelectronics International, vol. 32 no. 3
Type: Research Article
ISSN: 1356-5362

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Article
Publication date: 1 February 1983

Brian Waterfield, Peter Moran and Nihal Sinnadurai

ISHM (UK) presented a technical meeting on this topic on the 23rd October 1982 at the Cunard International Hotel, London. The meeting was attended by some 50 engineers, both those…

25

Abstract

ISHM (UK) presented a technical meeting on this topic on the 23rd October 1982 at the Cunard International Hotel, London. The meeting was attended by some 50 engineers, both those involved in the field of hybrids and potential users. It was generally felt that this was a useful meeting but more especially that it would have appealed to many potential users of hybrids, had the right people been able to be contacted.

Details

Microelectronics International, vol. 1 no. 2
Type: Research Article
ISSN: 1356-5362

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Article
Publication date: 2 August 2011

Piotr Markowski

The purpose of this paper is to investigate the possible application of thick‐film, metal‐based thermocouples to microsystems power supply. The subject of matter was development…

220

Abstract

Purpose

The purpose of this paper is to investigate the possible application of thick‐film, metal‐based thermocouples to microsystems power supply. The subject of matter was development of the procedure of thick‐film thermopile miniaturisation.

Design/methodology/approach

The aptitude of four photoimageable inks (based on silver or silver‐palladium) to fabrication of miniaturised thermocouples' arms was investigated. The object of interest was their compatibility with different kinds of low temperature cofired ceramic (LTCC) substrates, maximum resolution, shrinkage and electrical resistivity. Usage of the laser shaping technique to fabrication of narrow thermocouples' arms was also subject of matter. After tests and processes optimization both techniques were combined to fabricate the thick‐film Ag/Ni microthermopile.

Findings

Most of investigated inks were compatible with all tested LTCC tapes – fired as well as unfired (green tapes). Photoimageable inks technique can be successfully used for thermocouples' arms miniaturization. 40 μm/40 μm line/spaces resolution can be easily achieved. Combining this technique with laser shaping enabled microthermopile fabrication. It consisted of 42 Ag (photoimageable)/Ni (laser shaped) thermocouples. Arms width was 40 μm and 225 μm (Ag‐ and Ni‐arm, respectively), spaces between them – 65 μm. Overall, width of single thermocouple was smaller than 0.4 mm.

Practical implications

Fabrication of microthermopile consisting of several hundreds of thick‐film thermocouples will be possible if described procedure is applied. Such microgenerator will generate output power sufficient to supply some microsystems or microelectronic circuits.

Originality/value

The properties of four photoimageable inks were investigated as well as their compatibility with five different LTCC substrates (fired and unfired). Procedure of thick‐film microthermopile fabrication using photoimageable inks technique combined with laser shaping was proposed for the first time.

Details

Microelectronics International, vol. 28 no. 3
Type: Research Article
ISSN: 1356-5362

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Article
Publication date: 4 August 2014

Piotr Markowski

– The purpose of this work was fabrication of a small energy harvester.

253

Abstract

Purpose

The purpose of this work was fabrication of a small energy harvester.

Design/methodology/approach

The multilayer thermoelectric power generator based on thick-film and low temperature co-fired ceramic (LTCC) technology was fabricated. Precise paths printing method was used to fabricate Ag/Ni and Ag/PdAg thermocouples on a number of unfired LTCC tapes. The tapes were put together to form a multilayer stack. The via holes were used to make the electrical connections between adjacent layers. Finally, the multilayer stack was fired in the appropriate thermal profile.

Findings

It consists of 450 thermocouples and generates output voltage of about 0.45 V and output electrical power of about 0.13 mW when a temperature difference along the structure is 135°C. In the paper, individual stages of energy harvester fabrication process as well as its output parameters are presented.

Originality/value

Miniaturized thermoelectric energy harvester based on thick-film and LTCC technology was fabricated. As materials, metal-based pastes were used. This is the first paper where multilayer thermoelectric harvester, fabricated with the aid of LTCC technology, was described.

Details

Microelectronics International, vol. 31 no. 3
Type: Research Article
ISSN: 1356-5362

Keywords

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