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Precision active vibration isolation system (AVIS) is crucial for the mechanical processing equipment in the field of precision manufacturing. Working reliability and efficiency of the system directly influence operating condition of the equipment and the quality of work pieces.

A complete structure of the AVIS includes two parts: the excitation part and the passive vibration isolation system (PVIS). The excitation part consists of voice coil motors (VCMs). In this paper, the working process of AVIS is studied particularly via linear simplification on the decoupling model and the mechanical dynamic equations to solve the vibration problem, and they are validated by the experiments.

According to dynamic analysis and experiment on an AVIS on different reference points, the VCMs are used as actuators in the AVIS to excite the PVIS, and the performance characteristics of the whole AVIS is well reflected by the amplitude–frequency curves, the bode diagrams and the power spectral density curves.

This study has provided a way for obtaining the inner structure and working condition of the AVIS, which are essential to better control of the AVIS and to further study it in precision manufacturing application.