Search results

This paper aims to deal with the measurement of positioning accuracies of microscale components assembled to fabricate micro-optical benches (MOB).

The concept of MOB is presented to explain how to fabricate optical MEMS based on out-of-plane micro-assembly of microcomponents. This micro-assembly platform includes a laser sensor that enables to measure the position of the microcomponent after its assembly. The measurement set-up and procedure is displayed and applied on several micro-assembly sets.

The measurement system provides results with maximum deviation smaller than ±0.005°. Based on this measurement system and micro-assembly procedure displayed in the article, it is shown that it is possible to obtain a positioning accuracy up to 0.009°.

These results clearly show that micro-assembly is a possible way to fabricate complex, heterogeneous and 3D optical MEMS with very good optical performances.

This paper presents a cheap and easy‐to‐produce microprehensile microrobot on chip (MMOC). This four‐degree‐of‐freedom (DOFs) microprehensor is able to grip, hold and release submillimetric‐sized objects. The research conducted relied heavily on the design of a simple and efficient monolithic piezoelectric two‐DOF actuator, requiring no further motion transformation system and asking for no supplementary guiding system. The integration of all these functions in a single part eliminates nearly all assembly concerns. Each finger of the gripper is an actuator, called a duo‐bimorph, which provides higher deflections than piezoelectric tubes. The paper presents the developed MMOC prototype, comments its performances and details the functioning of the duo‐bimorph.