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This paper proposes an algorithm for the extraction of reduced order models of MEMS switches, based on using a physics aware simplification technique.

The reduced model is built progressively by increasing the complexity of the physical model. The approach starts with static analyses and continues with dynamic ones. Physical phenomena are introduced sequentially in the reduced model whose order is increased until accuracy, computed by assessing forces that are kept in the reduced model, is acceptable.

The technique is exemplified for RF-MEMS switches, but it can be extended for any device where physical phenomena can be included one by one, in a hierarchy of models. The extraction technique is based on analogies that are carried out for both the multiphysics and the full-wave electromagnetic phenomena and their couplings. In the final model, the multiphysics electromechanical phenomena is reduced to a system with lumped components with nonlinear elastic and damping forces, coupled with a system with distributed and lumped components which represents the reduced model of the RF electromagnetic phenomena.

Contrary to the order reduction by projection methods, this approach has the advantage that the simplified model can be easily understood, the equations and variables have significance for the user and the algorithm starts with a model of minimal order, which is increased until the approximation error is acceptable. The novelty of the proposed method is that, being tailored to a specific application, it is able to keep physical interpretation inside the reduced model. This is the reason why, the obtained model has an extremely low order, much lower than the one achievable with general state-of-the-art procedures.

The purpose of this paper is to propose a physics-aware algorithm to obtain radio frequency (RF)-reduced models of micro-electromechanical systems (MEMS) switches and show how, together with multiphysics macromodels, they can be realized as circuits that include both lumped and distributed parameters.

The macromodels are extracted with a robust procedure from the solution of Maxwell’s equations with electromagnetic circuit element (ECE) boundary conditions. The reduced model is extracted from the simulations of three electromagnetic field problems, in full-wave regime, that correspond to three configurations: signal lines alone, switch in the up and down positions.

The technique is exemplified for shunt switches, but it can be extended for lateral switches. Moreover, the algorithm is able take frequency dependence into account both for the signal lines and for the switch model. For the later, the order of the model is increased until a specified accuracy is achieved.

The use of ECE as boundary conditions for the RF simulation of MEMS switches has the advantage that the definition of ports is unambiguous and robust as the ports are clearly defined. The extraction approach has the advantage that the simplified model keeps the basic phenomena, i.e. the propagation of the signal along the lines. As the macromodel is realized with a netlist that uses transmission lines models, the lines’ extension is natural. The frequency dependence can be included in the model, if needed.