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Publication date: 16 January 2020

Alhan Farhanah Abd Rahim, Aida Azrenda Mustakim, Nurul Syuhadah Mohd Razali, Ainorkhilah Mahmood, Rosfariza Radzali, Ahmad Sabirin Zoolfakar and Yusnita Mohd Ali

Porous silicon (PS) was successfully fabricated using an alternating current photo-assisted electrochemical etching (ACPEC) technique. This study aims to compare the effect of…

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Abstract

Purpose

Porous silicon (PS) was successfully fabricated using an alternating current photo-assisted electrochemical etching (ACPEC) technique. This study aims to compare the effect of different crystal orientation of Si n(100) and n(111) on the structural and optical characteristics of the PS.

Design/methodology/approach

PS was fabricated using ACPEC etching with a current density of J = 10 mA/cm2 and etching time of 30 min. The PS samples denoted by PS100 and PS111 were etched using HF-based solution under the illumination of an incandescent white light.

Findings

FESEM images showed that the porous structure of PS100 was a uniform circular shape with higher density and porosity than PS111. In addition, the AFM indicated that the surface roughness of porous n(100) was less than porous n(111). Raman spectra of the PS samples showed a stronger peak with FWHM of 4.211 cm−1 and redshift of 1.093 cm−1. High resolution X-ray diffraction revealed cubic Si phases in the PS samples with tensile strain for porous n(100) and compressive strain for porous n(111). Photoluminescence observation of porous n(100) and porous n(111) displayed significant visible emissions at 651.97 nm (Eg = 190eV) and 640.89 nm (Eg = 1.93 eV) which was because of the nano-structure size of silicon through the quantum confinement effect. The size of Si nanostructures was approximately 8 nm from a quantized state effective mass theory.

Originality/value

The work presented crystal orientation dependence of Si n(100) and n(111) for the formation of uniform and denser PS using new ACPEC technique for potential visible optoelectronic application. The ACPEC technique has effectively formed good structural and optical characteristics of PS.

Details

Microelectronics International, vol. 37 no. 1
Type: Research Article
ISSN: 1356-5362

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