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Article
Publication date: 1 February 1993

Gino Cardarelli, Pacifico Marcello Pelagagge and Agostino Granito

The principal results of a study concerning the industrial transfer in MOS memory wafer fabrication, of an intrabay material handling system based on a track‐robot are presented…

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Abstract

The principal results of a study concerning the industrial transfer in MOS memory wafer fabrication, of an intrabay material handling system based on a track‐robot are presented. A prototype system, installed in L'Aquila University Operations Laboratory, was used in order to verify the congruence of the track‐robot performance within the productive tasks to be carried out. Particular attention was given to the safety systems and the vibrational behaviour of the track‐robot, that strictly influence the aspects that can create risks for a person's safety or the wafer's integrity.

Details

Assembly Automation, vol. 13 no. 2
Type: Research Article
ISSN: 0144-5154

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