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Detecting O₂ gas in a confined space at room temperature is particularly important to monitor the work process of precision equipment. This study aims to propose a miniaturized, low-cost, mass-scale produced O₂ sensor operating around 30°C.

The O₂ sensor based on lanthanum fluoride (LaF₃) solid electrolyte thin film was developed using MEMS technology. The principle of the sensor was a galvanic cell H₂O, O₂, Pt | LaF₃ | Sn, SnF₂ |, in which the Sn film was prepared by magnetron sputtering, and the LaF₃ film was prepared by thermal resistance evaporation.

Through pretreatments, the sensor’s response signal to 40% oxygen concentration was enhanced from 1.9 mV to 46.0 mV at 30°C and 97.0% RH. Tests at temperatures from 30°C to 50°C and humidity from 32.4% RH to 97.0% RH indicated that the output electromotive force (EMF) has a linear relationship with the logarithm of the oxygen concentration. The sensitivity of the sensor increases with an increase in both humidity and temperature in the couple mode, and the EMF of the sensor follows well with the Nernst equation at different temperatures and humidity.

This research could be applied to monitor the oxygen concentration below 25% in confined spaces at room temperature safely without a power supply.

The relationship between temperature and humidity coupling and the response of the sensor was obtained. The nano-film material was integrated with the MEMS process. It is expected to be practically applied in the future.