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This paper aims to present the design of a micro-electro-mechanical system (MEMS)-based three-dimensional combined vector hydrophone tailored for unmanned underwater vehicles (UUVs). The proposed design addresses the left-right ambiguity inherent in conventional MEMS hydrophones and enhances acoustic sensing capabilities to support improved UUV performance in underwater environments.

A novel MEMS-based three-dimensional vector hydrophone (M3DH) is proposed, integrating a highly sensitive MEMS chip with a piezoelectric ceramic-based scalar channel. A theoretical model of the hydrophone’s packaging was developed, and its acoustic performance was analyzed through COMSOL Multiphysics 6.2 simulations. Experimental validation of the hydrophone’s sensitivity and directional characteristics was conducted in a standing wave tank.

The MEMS-based three-dimensional combined hydrophone (M3DH) achieved a triaxial vector channel sensitivity of −175.6 dB at 800 Hz (re 1 V/µPa) and a scalar channel sensitivity of −186.3 dB (0 dB = 1 V/µPa). In addition, at 500 Hz, the vector channel exhibited a distinct “8”-shaped directivity pattern, whereas the scalar channel maintained a circular omnidirectional response. The hydrophone demonstrated excellent acoustic performance in three-dimensional space, effectively providing comprehensive acoustic information for small underwater platforms.

This research addresses the left-right ambiguity issue in MEMS hydrophones by presenting an MEMS-based three-dimensional combined hydrophone designed for integration into UUVs, offering an innovative solution to enhance underwater acoustic sensing capabilities in small platforms.

Currently, various detection technologies for unmanned underwater vehicles are highly susceptible to environmental impacts. Wake detection technologies have gradually gained attention and development. However, the clarity of detection results remains a challenge. This paper aims to present the design of a MEMS three-dimensional vector wake sensor. Compared to similar sensors, the MEMS three-dimensional vector wake sensor offers improved propeller wake measurement capabilities.

A MEMS three-dimensional vector wake sensor inspired by the fish lateral line system is designed. This paper discusses the working principle of the sensor. Finite element simulation is used to determine the optimal dimensions of the sensor’s sensitive chip and packaging structure. In addition, the wake environment is simulated for performance testing.

Flow velocity calibration test results confirm that the MEMS three-dimensional vector wake sensor exhibits high sensitivity, achieving 1727.6 mV/(m/s). Vector capability tests show that the data consistency in the same direction reaches 91.8%. The sensor demonstrates strong vector detection capability.

The MEMS three-dimensional vector wake sensor plays a critical role in the formation control of unmanned underwater vehicle fleets and target detection.

This study focuses on applications for unmanned underwater vehicles. It enhances the detection capabilities of unmanned underwater vehicles. This is of significant importance for future deep-sea target detection.

This study aims to design a small-size conformable flexible micro-electro-mechanical system (MEMS) vector hydrophone to meet the miniaturization requirements of unmanned underwater vehicle.

The cilia receive the acoustic signal to oscillate to cause changes in the stress on the beam, which in turn causes changes in the piezoresistive resistance on the beam, and changes in the resistance cause changes in the output voltage.

The results show that the flexible hydrophone in the paper has a sensitivity of −182 dB@1 kHz (re 1V/µPa) at 1 Pa sound pressure, can detect low-frequency hydroacoustic signals from 20 to 550 Hz and has good spatial directivity, and the flexible substrate permits the hydrophone to realize bending deformation, which can be well attached to the surface of the object.

In this study, a finite element simulation model of the hydrophone microstructure is constructed and its performance is verified by simulation. The success rate of the proposed MEMS transfer process is as high as 94%, and the prepared piezoresistors exhibit excellent resistance characteristics and high consistency. These results provide innovative ideas to enhance the performance and stability and achieve miniaturization of hydrophones.