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This study aims to provide a comprehensive overview of thin-film temperature sensors (TTS), focusing on the interplay between material properties and fabrication techniques. It evaluates the current state of the art, addressing both low- and high-temperature sensors, and explores the potential applications across various fields. The study also identifies challenges and highlights emerging trends that may shape the future of this technology.

This study systematically examines existing literature on TTS, categorizing the materials and fabrication methods used. The study compares the performance metrics of different materials, addresses the challenges encountered in thin-film sensors and reviews the case studies to identify successful applications. Emerging trends and future directions are also analyzed.

This study finds that TTS are integral to various advanced technologies, particularly in high-performance and specialized applications. However, their development is constrained by challenges such as limited operational range, material degradation, fabrication complexities and long-term stability. The integration of nanostructured materials and the advancement of wireless, self-powered and multifunctional sensors are poised to drive significant advancements in this field.

This study offers a unique perspective by bridging the gap between material science and application engineering in TTS. By critically analyzing both established and emerging technologies, the study provides valuable insights into the current state of the field and proposes pathways for future innovation in terms of interdisciplinary approaches. The focus on emerging trends and multifunctional applications sets this review apart from existing literature.