Keywords
Citation
Rigelsford, J. (2004), "MEMS Mechanical Sensors", Sensor Review, Vol. 24 No. 4, pp. 395-395. https://doi.org/10.1108/sr.2004.24.4.395.2
Publisher
:Emerald Group Publishing Limited
Copyright © 2004, Emerald Group Publishing Limited
“MEMS Mechanical Sensors” is a practical guide to the design, simulation, fabrication and application of MEMS sensors. The ten chapters' covers all aspects of MEMS sensors, and addresses smart sensors and physical sensing techniques including piezoresistive, piezoelectric, capacative, optical, resonant, actuation, thermal, and magnetic.
Chapter 1 provides an Introduction to the subject, while Chapter 2 discusses
Materials and Fabrication Techniques. Chapters 3 and 4 address Design Tools, and Packaging, respectively. Physical Sensing Techniques are discussed in Chapter 5. The remaining five chapters of the book address: Pressure Sensors, Force and Torque Sensors, Inertial Sensors, Flow Sensors for Microfluidics, and Displacement Sensors.
Overall, it is a well‐written book that will be invaluable for anyone involved with, or interested in MEMS sensors. It is suitable for practicing engineers, academics and research, undergraduate and graduate students on engineering courses.