Nanostructured Micromachined Devices

Citation

(2004), "Nanostructured Micromachined Devices", Sensor Review, Vol. 24 No. 3. https://doi.org/10.1108/sr.2004.08724cad.010

Nanostructured Micromachined Devices

Nanostructured Micromachined Devices

Applicant: NanoProducts Corporation, USAPatent number: US6,705,152Publication date: 16 March 2004Title: Nanostructured ceramic platform for micromachined devices and device arrays

Keywords: Nanotechnology, Patents, Ceramics

The present invention discloses a type of extremely high-density nanostructured ceramic platform for gas sensors and sensor arrays. The nanoporous anodic aluminum oxide can be micromachined to form the sensor substrate and used for making advanced nanostructured sensing elements.

The nanoporous morphology of such sensing element enables the desired grain size, high specific area and therefore, high sensitivity, while the micromachined ceramic substrate would define the sensor and the array, provides the interface with the readout and control circuit, low-power consumption, enables long lifetime and stability in harsh environments. Such a sensor platform can be used for both chemical gas and physical sensors, such as humidity and temperature, and sensor arrays. The interaction between the sensor and the analyte may be physical, chemical, electronic, electrical, magnetic, structural, thermal, optical, or a combination of these.