Keywords
Citation
Rigelsford, J. (2003), "MEMS Scanning Mirror", Sensor Review, Vol. 23 No. 3. https://doi.org/10.1108/sr.2003.08723cad.011
Publisher
:Emerald Group Publishing Limited
Copyright © 2003, MCB UP Limited
MEMS Scanning Mirror
MEMS Scanning Mirror
Applicant: Intermec IP Corp., USAPatent number: US6,155,490Publication date: 5 December 2000Title: Microelectromechanical systems scanning mirror for a laser scanner
Keywords: MEMS, Laser scanning, Patents
This patent presents a microelectromechanical (MEMS) scanning mirror for a laser scanner. The MEMS scanning mirror provides many advantages over conventional scanner mirror designs as well as current implementations of MEMS scanning mirrors, being much smaller, quicker, and more precise. Additionally, the device may be manufactured along with the associated scanner electronics in a similar type of manufacturing process and thereby improving reliability and reducing manufacturing time and costs.
In one embodiment of the invention, the light beam scanner comprises a light source providing a beam of light to a MEMS mirror that reflects the beam of light through a light-transmissive window in a defined scan pattern to a desired target. A light detector receives the light reflected from the target back through the light-transmissive window. The light detector may be disposed adjacent to or centrally around the MEMS mirror. The MEMS scanning mirror oscillates to provide a scan pattern to the beam of light. The MEMS scanning mirror comprises a resonate transducer in order to oscillate the reflective surface to provide a desired scan pattern. The MEMS mirror may comprise a portion of the scanner electronics.