Keywords
Citation
(1999), "SensArray's Process Probe 1630 instrumented wafers provide accurate wafer temperature measurement for atmospheric CVD", Sensor Review, Vol. 19 No. 2. https://doi.org/10.1108/sr.1999.08719baf.009
Publisher
:Emerald Group Publishing Limited
Copyright © 1999, MCB UP Limited
SensArray's Process Probe 1630 instrumented wafers provide accurate wafer temperature measurement for atmospheric CVD
SensArray's Process Probe 1630 instrumented wafers provide accurate wafer temperature measurement for atmospheric CVD
Keywords Temperature, Semiconductors
Rugged instrumented wafers monitor temperature in real time from 0°C to 800°C in furnaces that use moving belts or trays.
SensArray® Corporation, a provider of innovative temperature metrology solutions for semiconductor, LCD, and memory disk fabrication processes, announces Process Probe® 1630 instrumented wafers for accurate multipoint wafer temperature measurement of atmospheric CVD processes in situ in real time (see Plate 8). The instrumented wafers feature a rugged design for monitoring temperature in furnaces that use moving belts or trays, such as Watkins-Johnson's TEOS-based systems. Process Probe 1630 wafers monitor temperature from 0°C to 800°C with ± 1.1°C accuracy or ±0.4 per cent of reading, <±0.1°C sensor-to-sensor precision, and significantly improved reliability over Process Probe 1605 wafers.
Plate 8 SensArray's Process Probe 1630 instrumented wafer
The instrumented wafers are used to characterize processes, calibrate temperature setpoints, and evaluate temperature variations along moving belts. They can have up to 16 embedded thermocouples to map the temperature across a wafer, and the sensors can be embedded in bare, coated, or patterned substrates to match the thermal properties of test or product wafers. The wafers are available in diameters from 100 to 300mm.
SensArray Process Probe wafers can be used with the new SensArray palm-sized Thermal TRACK™ maintenance tool. Thermal TRACK shows wafer temperature data as a wafer image with digital temperature indicators at each sensor location and displays minimum, maximum, and average temperature. It can also output a strip chart record of temperature versus time for each temperature channel. Data can then be transferred to spreadsheets for further evaluation or to SensArray's Thermal MAP® 2 data analysis system.
For further information on Process Probe 1630 instrumented wafers or other SensArray metrology products, call SensArray at 408-330-5600 or refer to the company's Web site at www.sensarray.com. SensArray Corporation, 3410 Garrett Drive, Santa Clara, CA 95054, USA. Tel: 408 727 4656; Fax: 408 496 6929; E-mail: info@sensarray.com