Introducing the technique for the dynamic hardness measurement of thin films and coatings

Microelectronics International

ISSN: 1356-5362

Article publication date: 1 August 2001

61

Keywords

Citation

(2001), "Introducing the technique for the dynamic hardness measurement of thin films and coatings", Microelectronics International, Vol. 18 No. 2. https://doi.org/10.1108/mi.2001.21818bad.008

Publisher

:

Emerald Group Publishing Limited

Copyright © 2001, MCB UP Limited


Introducing the technique for the dynamic hardness measurement of thin films and coatings

Introducing the technique for the dynamic hardness measurement of thin films and coatings

Keywords LOT, Hardness testing, Coatings

It is now possible to measure the dynamic hardness of thin films and coatings with the new NanoTest pendulum impulse technique. Dynamic hardness is crucial to many industrial processes which involve rapid mechanical interactions, such as wire bonding in integrated circuits and metal cutting with coated tool bits. Up until now, it has been impossible to measure the dynamic hardness of thin films and coatings, as traditional methods are only possible on very large thick, bulk samples and are therefore of no use to the microelectronics and hi-tech coatings industries.

Dynamic hardness measurements have great practical importance since dynamic hardness values are usually higher than static hardness values. It is expected that opening up the possibility of measuring the dynamic hardness of thin coatings will be of great interest to not only a wide range of companies across the commercial hi-tech coatings and microelectronics sectors, but also Government research laboratories, R&D institutes, Defence/Military and University Engineering Departments.

Further details: Jason Bennett. Tel: +44 1372 378822; Fax: +44 1372 375353; E-mail: ir@lotoriel.co.uk; Internet: www.lotoriel.co.uk

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