Keywords
Citation
(2000), "New high density RF plasma source reduces contaminants to produce higher quality thin films", Microelectronics International, Vol. 17 No. 2. https://doi.org/10.1108/mi.2000.21817bad.008
Publisher
:Emerald Group Publishing Limited
Copyright © 2000, MCB UP Limited
New high density RF plasma source reduces contaminants to produce higher quality thin films
Keywords Manitou Systems, Thin film, Plasma
Manitou Systems, Inc. has introduced a new family of high density plasma sources. The innovative new plasma sources improve the quality of thin trims by reducing contaminants and deposited film inclusions.
The Delta GlowTM family is designed to generate dense gas plasma for thin film deposition, etching, and material surface modification applications. These applications include vacuum chamber conditioning and cleaning, PECVD, polymer material surface treatments and in situ enhancements of the thin film deposition process. Delta Glow also enhances the activation and removal of water vapor from chamber walls and substrate surfaces that conventional heating methods are unable to achieve.
The new plasma source reduces oxygen contamination that conventional diagnostic techniques fail to detect and remove. When the Delta Glow high energy plasma source is used to clean a vacuum system, the bombardment of system surfaces with electrons and ions stimulates desorption of water bonded to system surfaces, resulting in a cleaner system with less film contamination during subsequent processing.
The Delta Glow product family consists of three different models, each with its own high efficiency RF power delivery system. It also runs with an existing RF power system. The vacuum chamber interface is a standard ISO type flange or a custom interface plate. Process gas enters the reactor tube via a VCR fitting. A standard quartz reactor tube is the only consumable; however, aggressive fluorine-based processes may require the use of an optional alumina or sapphire reactor tube.
For further information, please contact: Steven M. Simons. Tel: 203-792-8797, ext.302; E-mail: ssimons@manitousys.com