Enhanced electron microscope imaging aids inspection

Abstract

A new digital image processing system for slow scan devices such as scanning electron microscopes has overcome current difficulties in inspecting components such as photoresist masks which, because of their insulating properties, affect the electron microscope picture.

Citation

Sim, F. (1984), "Enhanced electron microscope imaging aids inspection", Sensor Review, Vol. 4 No. 4, pp. 170-171. https://doi.org/10.1108/eb007646