Progress of MEMS acoustic emission sensor: a review
ISSN: 0260-2288
Article publication date: 3 June 2024
Issue publication date: 26 June 2024
Abstract
Purpose
Based on the micro-electro-mechanical system (MEMS) technology, acoustic emission sensors have gained popularity owing to their small size, consistency, affordability and easy integration. This study aims to provide direction for the advancement of MEMS acoustic emission sensors and predict their future potential for structural health detection of microprecision instruments.
Design/methodology/approach
This paper summarizes the recent research progress of three MEMS acoustic emission sensors, compares their individual strengths and weaknesses, analyzes their research focus and predicts their development trend in the future.
Findings
Piezoresistive, piezoelectric and capacitive MEMS acoustic emission sensors are the three main streams of MEMS acoustic emission sensors, which have their own advantages and disadvantages. The existing research has not been applied in practice, and MEMS acoustic emission sensor still needs further research in the aspects of wide frequency/high sensitivity, good robustness and integration with complementary metal oxide semiconductor. MEMS acoustic emission sensor has great development potential.
Originality/value
In this paper, the existing research achievements of MEMS acoustic emission sensors are described systematically, and the further development direction of MEMS acoustic emission sensors in the future research field is pointed out. It provides an important reference value for the actual weak acoustic emission signal detection in narrow structures.
Keywords
Acknowledgements
This work was supported in part by the National Major Scientific Instrument Research Project of NSFC under Grant No. 61927807, the National Natural Science Foundation of China under Grant No.62271235 and the Foundation of State Key Laboratory of Dynamic Testing Technology under Grant No. 2022-SYSJJ-10.
In the process of completing this study, the author expresses sincere gratitude to his teachers who gave him careful guidance and valuable advice. To all the individuals and institutions who helped the author in the course of his research, they have made significant contributions to the completion of this paper. The author expresses sincere gratitude to them.
Citation
Zhang, J., Zhang, S., Yang, Y. and Zhang, W. (2024), "Progress of MEMS acoustic emission sensor: a review", Sensor Review, Vol. 44 No. 4, pp. 414-428. https://doi.org/10.1108/SR-06-2023-0232
Publisher
:Emerald Publishing Limited
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