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High-precision width measurement method of laser profile sensor

Yu Feng (Department of Instrument Science and Engineering, Shanghai Jiao Tong University, Shanghai, China)
Wei Tao (Shanghai Jiao Tong University – Minhang Campus, Shanghai, China)
Yiyang Feng (Department of Instrument Science and Engineering, Shanghai Jiao Tong University, Shanghai, China)
Xiaoqia Yin (Department of Instrument Science and Engineering, Shanghai Jiao Tong University, Shanghai, China)
Na Lv (Shanghai Jiao Tong University – Minhang Campus, Shanghai, China)
Hui Zhao (Department of Instrument Science and Engineering, Shanghai Jiao Tong University – Minhang Campus, Shanghai, China)

Sensor Review

ISSN: 0260-2288

Article publication date: 11 November 2020

Issue publication date: 19 November 2020

375

Abstract

Purpose

Although a laser profile sensor (LPS) can be used to measure dimensions, the “shadow region” generally degrades the accuracy and precision of width measurements. The accuracy and precision of such measurements should be improved.

Design/methodology/approach

In this paper, the authors propose herein a technique that combines high dynamic range (HDR) imaging with logistic fitting. First, a HDR image is composed of several images acquired with different exposure times, which augments the grayscale of the object profile and significantly reduces overexposure. Next, the profile is fit to a logistic function, which provides accurate and precise edge coordinates. Finally, given the edge coordinates, the object width is calculated.

Findings

To verify the stability of this logistic algorithm, the authors simulate different noise conditions and different degrees of incomplete edge data. In addition, the progressiveness of the algorithm is demonstrated by comparing the results with those of other algorithms and with the height measurement. Furthermore, the suitability of the system is verified experimentally.

Research limitations/implications

Because of the limitation of the condition of laboratory, in the experimental section, this paper cannot represent perfectly the industrial situation. It makes this section limited in demonstration.

Originality/value

In this paper, the results show that the measurement accuracy and precision of the width is improved and exceeds that of the height measurement. The proposed HDR imaging method with logistic fitting may be applied to LPS width measurements, which should significantly aid the development of LPSs.

Keywords

Acknowledgements

This work was supported by the National Natural Science Foundation of China No. 51975374 and National Natural Science Foundation of China No. 61927822. The authors are grateful for the financial support of these foundations, which was indispensable to the success of this project.

Citation

Feng, Y., Tao, W., Feng, Y., Yin, X., Lv, N. and Zhao, H. (2020), "High-precision width measurement method of laser profile sensor", Sensor Review, Vol. 40 No. 6, pp. 699-707. https://doi.org/10.1108/SR-06-2019-0154

Publisher

:

Emerald Publishing Limited

Copyright © 2020, Emerald Publishing Limited

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