Design and simulation of a MEMS-based piezoelectric micropump for bio-medical applications

Abstract

Purpose

The purpose of this paper is to design and simulate a piezoelectric micropump using microelectromechanical systems technology for drug delivery applications.

Design/methodology/approach

Two piezoelectric actuators are used to actuate and bend the diaphragms in the proposed structure. In this micropump, the liquid flow is rectified by two silicon check valves.

Findings

The use of two piezoelectric transducer (PZT) actuators in the parallel mod not only reduces dead volume but also increases stroke volume as well. In addition to increasing the flow rate, this phenomenon enhances the operation of the micropump to have self-priming as smoothly as possible.

Originality/value

This actuating method results in a 22% increase in flow rate and compression ratio, as well as a 15% reduction in function voltage. The fluid-solid interaction is simulated using COMSOL Multiphysics 5.3a.

Citation

Habashi Youvalari, S., Olianezhad, A. and Afrang, S. (2023), "Design and simulation of a MEMS-based piezoelectric micropump for bio-medical applications", Sensor Review, Vol. 43 No. 5/6, pp. 332-346. https://doi.org/10.1108/SR-01-2023-0004