Performance simulation and testing of capacitive micro-machined ultrasonic transducer
ISSN: 0260-2288
Article publication date: 13 June 2019
Issue publication date: 26 July 2019
Abstract
Purpose
This study aims to simulate and test the performance of a transmitting and receiving capacitive micro-machined ultrasonic transducer (CMUT). Aimed at detecting demand of the CMUT, a matched integrated adjustment circuit was designed through analyzing processing methods of transducer’s weak echo signal.
Design/methodology/approach
Based on the analysis of CMUT array structure and work principle, the CMUT units are designed and the dynamic performance analysis of SIMULINK is given according to the demand of underwater detecting. A transceiver isolation circuit is used to make transmission mode and receiving mode separate. A detection circuit is designed based on the transimpedance amplifier to achieve extraction of high-frequency and weak signal.
Findings
Through experimentation, the effectiveness of the CMUT performance simulation and the transceiver integrated adjustment circuit were verified. In addition, the test showed that CMUT with 400 kHz frequency has wider bandwidth and better dynamic characteristics than other similar transducers.
Originality/value
This paper provides a theoretical basis and design reference for the development and application of CMUT technology.
Keywords
- MEMS
- Dynamic performance
- Ultrasonic sensors
- Underwater applications
- Detection circuit
- Transmission transducer
- Capacitive micro-machined ultrasonic transducer
- Receipt and transmission transducer
- MEMS
- Dynamic performance
- Ultrasonic sensors
- Underwater applications
- Detection circuit
- Transmission transducer
- Capacitive micro-machined ultrasonic transducer
Acknowledgements
This work was supported by Applied Basic Research Program of Shanxi Province under Grant 201801D221179, and Doctoral Research Project of Taiyuan University of Science and Technology under Grant 20162036. National Natural Science Foundation of China under Grant 61127008, Industrial and Educational Cooperation and Collaborative Education Project of the Ministry of Education of China under Grant 201801121011.
Citation
Zhang, R., Zhao, L., Xie, D., Song, J., Zhang, W., Pan, L. and Zhang, Y. (2019), "Performance simulation and testing of capacitive micro-machined ultrasonic transducer", Sensor Review, Vol. 39 No. 4, pp. 554-566. https://doi.org/10.1108/SR-01-2019-0015
Publisher
:Emerald Publishing Limited
Copyright © 2019, Emerald Publishing Limited