Performance enhancement for piezoresistive microaccelerometer by geometrical design: a focused review

Abstract

Purpose

This paper aims to provide a focused review on the geometrical designs for performance enhancement of piezoresistive microaccelerometers.

Design/methodology/approach

By analyzing working principle and conventional geometries, the improved research proposals are sorted into three groups in terms of their anticipated objectives, including sensitivity, resonant frequency and cross-axis sensitivity. Accessible methods are outlined and their merits and demerits are described.

Findings

Novel geometries obviously enhance the performance of accelerometers, and the efficacy can be further elevated by newer materials and fabrication processes.

Research limitations/implications

This paper mainly focused on the improved geometrical designs for sensitivity, resonant frequency and cross-axis sensitivity. Other performance parameters or design schemes are not included in this paper.

Originality/value

This paper generalizes the available geometries and methods for the enhancement of sensitivity, resonant frequency and cross-axis sensitivity in piezoresistive accelerometers design.

Citation

Liu, Y., Wang, H., Qin, H. and Xie, Y. (2015), "Performance enhancement for piezoresistive microaccelerometer by geometrical design: a focused review", Sensor Review, Vol. 35 No. 3, pp. 310-318. https://doi.org/10.1108/SR-01-2015-0019