Three axial low temperature cofired ceramic accelerometer

Abstract

Purpose

The paper aims to present numerical modeling and technology of a very first three axial low temperature cofired ceramics (LTCC) accelerometer.

Design/methodology/approach

Low temperature cofired ceramics technology was applied in the fabrication process of the novel device. The numerical modeling was used to predict the properties of the accelerometer, moreover, design of the experiment methodology was used to reduce time of simulation and to get as much as information from the experiment as possible.

Findings

The low temperature cofired ceramics make it possible to fabricate three axial accelerometer.

Research limitations/implications

The presented device is just a first prototype. Therefore, further research work will be needed to improve structural drawbacks and to analyze precisely the device reliability and parameters repeatability.

Practical implications

The device presented in the paper can be applied in systems working in a harsh environment (high temperature and humidity). Ceramic sensors can withstand temperatures up to 600°C.

Originality/value

This paper presents novel three axial LTCC accelerometer.

Citation

Jurków, D. (2013), "Three axial low temperature cofired ceramic accelerometer", Microelectronics International, Vol. 30 No. 3, pp. 125-133. https://doi.org/10.1108/MI-11-2012-0077