Effects of three-step magnesium doping in p-GaN layer on the properties of InGaN-based light-emitting diode

Abstract

Purpose

The purpose of this paper is to enhance the efficiency of the LED by introducing three-step magnesium (Mg) doping profile. Attention was paid to the effects of the Mg doping concentration of the first p-GaN layer (i.e. layer close to the active region). Attention was paid to the effects of the Mg doping concentration of the first p-GaN layer (i.e. layer close to the active region).

Design/methodology/approach

Indium gallium nitride (InGaN)–based light-emitting diode (LED) was grown on a 4-inch c-plane patterned sapphire substrate using metal organic chemical vapor deposition. The Cp₂Mg flow rates for the second and third p-GaN layers were set at 50 sccm and 325 sccm, respectively. For the first p-GaN layer, the Cp₂Mg flow rate varied from 150 sccm to 300 sccm to achieve different Mg dopant concentrations.

Findings

The full width at half maximum (FWHM) for the GaN (102) plane increases with increasing Cp₂Mg flow rate. FWHM for the sample with 150, 250 and 300 sccm Cp₂Mg flow rates was 233 arcsec, 236 arcsec and 245 arcsec, respectively. This result indicates that the edge and mixed dislocations in the p-GaN layer were increased with increasing Cp₂Mg flow rate. Atomic force microscopy (AFM) results reveal that the sample grown with 300 sccm exhibits the highest surface roughness, followed by 150 sccm and 250 sccm. The surface roughness of these samples is 2.40 nm, 2.12 nm and 2.08 nm, respectively. Simultaneously, the photoluminescence (PL) spectrum of the 250 sccm sample shows the highest band edge intensity over the yellow band ratio compared to that of other samples. The light output power measurements found that the sample with 250 sccm exhibits high output power because of sufficient hole injection toward the active region.

Originality/value

Through this study, the three steps of the Mg profile on the p-GaN layer were proposed to show high-efficiency InGaN-based LED. The optimal Mg concentration was studied on the first p-GaN layer (i.e. layer close to active region) to improve the LED performance by varying the Cp₂Mg flow rate. This finding was in line with the result of PL and AFM results when the samples with 250 sccm have the highest Mg acceptor and good surface quality of the p-GaN layer. It can be deduced that the first p-GaN layer doping has a significant effect on the crystalline quality, surface roughness and light emission properties of the LED epi structure.

Citation

Hamzah, N.A., Ahmad, M.A., Mohd Asri, R.I., Alias, E.A., Md Sahar, M.A.A.Z., Sha Shiong, N. and Hassan, Z. (2021), "Effects of three-step magnesium doping in p-GaN layer on the properties of InGaN-based light-emitting diode", Microelectronics International, Vol. 38 No. 3, pp. 127-134. https://doi.org/10.1108/MI-02-2021-0016