Silicon integrated optics and sensor applications

Abstract

A review of integrated optical circuit technologies [OIC] and their relevance to potential OIC sensor application. Describes the manufacture of OICs and the varied range of material technologies used. Active Silicon Integrated Optical Circuits have been developed which may have applications for many optical sensor and fibre optic sensor systems. Concludes however that silicon integrated optics will not enjoy large‐scale success until their manufacturing costs have been dramatically reduced.

Citation

Rickman, A.G. (1994), "Silicon integrated optics and sensor applications", Sensor Review, Vol. 14 No. 1, pp. 27-29. https://doi.org/10.1108/EUM0000000004246