Silicon pressure sensors with a thick film periphery

Abstract

Silicon piezoresistive pressure sensor dies are mounted on a ceramic substrate where the signal conditioning electronics are implemented in thick film technology. In this paper some of these techniques, e.g. special attachment and bonding requirements, methods for temperature compensation, the principles of parameter adjustment, and encapsulation, are presented. For illustration two examples are described. The first is a multipoint monitoring system with 720 measuring points in a test mattress. The second example is a family of industrial pressure transducers.

Citation

Belavič, D., Šoba, S., Pavlin, M., Ročak, D. and Hrovat, M. (1998), "Silicon pressure sensors with a thick film periphery", Microelectronics International, Vol. 15 No. 3, pp. 26-30. https://doi.org/10.1108/13565369810233122