The Contamination Audit – A Vital Tool For Yield Improvement

Abstract

With the increasing trends towards fineline circuitry, contamination has become a major cause of defects. This paper outlines the techniques used in conducting a Contamination Audit and in generating a Contamination Matrix, which is a map of the types of contamination and their relative levels within a facility. Using the Contamination Matrix contamination control measures can be targetted in the most effective manner to achieve yield improvements.

Citation

Hamilton, S. (1996), "The Contamination Audit – A Vital Tool For Yield Improvement", Circuit World, Vol. 22 No. 1, pp. 23-25. https://doi.org/10.1108/03056129610799859