US company launches first MEMS‐based IR detector array
Robert W. Bogue
(is an Associate Editor for Sensor Review)
579
Abstract
Describes the world's first uncooled infrared array sensor based on micro electro‐mechanical systems technology. Each pixel comprises a cantilever which bends as it warms up. The system measures the capacitance between each cantilever and a metal substrate.
Keywords
Citation
Bogue, R.W. (2003), "US company launches first MEMS‐based IR detector array", Sensor Review, Vol. 23 No. 4, pp. 299-301. https://doi.org/10.1108/02602280310496809
Publisher
:MCB UP Ltd
Copyright © 2003, MCB UP Limited