Miniature mass spectrometry: implications for monitoring of gas discharges

Abstract

In the last 10 years there has been an increasing trend towards miniaturisation in mass spectrometry. Miniature versions of magnetic sector, time of flight (TOF) and quadrupole mass spectrometers (QMS) have all been developed. Some of these systems use silicon microengineering technology, e.g. MEMS, to achieve the small geometries necessary, other systems use conventional engineering but on a reduced scale. The scientific advantages of miniaturisation include the ability to measure and monitor at higher vacuum pressures than hitherto (>10⁻² mbar). Miniaturisation also offers advantages due to the reduced cost and resulting portable nature of the smaller instruments.

Citation

Taylor, S., Gibson, J.R. and Srigengan, B. (2003), "Miniature mass spectrometry: implications for monitoring of gas discharges", Sensor Review, Vol. 23 No. 2, pp. 150-154. https://doi.org/10.1108/02602280310468260