MEMS fabrication
Michael Huff
(Michael Huff is at the MEMS Exchange, Corporation for National Research Initiatives, 1895 Preston White Drive, Suite 100, Reston, Virginia 20191‐5434, USA)
3908
Abstract
Describes the key attributes of MEMS technology and existing and future business opportunities. Discusses the various stages in the fabrication of MEMS devices and offers guidance regarding the selection of processing methods for deposition, lithography and etching. Also describes the MEMS‐Exchange program and associated network of fabrication centres.
Keywords
Citation
Huff, M. (2002), "MEMS fabrication", Sensor Review, Vol. 22 No. 1, pp. 18-33. https://doi.org/10.1108/02602280210697087
Publisher
:MCB UP Ltd
Copyright © 2002, Company